SSDH Series of Intermediate Frequency Magnetron Sputtering Power Supply

SSDH Series of Intermediate Frequency Magnetron Sputtering Power Supply

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Technical Specification of Intermediate Frequency Magnetron Sputtering Power Supply, SSDH Series

SSDH series of intermediate frequency magnetron sputtering power supply work in two-stage high frequency conversion mode, AC sinusoidal output. The power output frequency can be set to 100, 125, 150, 175, 200 kHz, or 200, 250, 350, 400 kHz, for the deposition of compound film, and related technological development.

Power Range

2-20kW

Input Power

AC380V±10%, three phase four wire system, 50-60Hz

Output Mode

Quasi-sine wave

Output Frequency

100, 125, 150, 175, 200 kHz,或者200, 250, 350, 400 kHz

Output Voltage

No load 1200V [effective value]

Output Features

Constant current / constant power / constant voltage

Arc extinguishing time

≤1μs

Output Stability

0.25%

Cooling Mode

Air-cooled

Service Environment

Ambient Temperature 0-40℃
Ambient Humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive flammable gas, good ventilation

Communication Mode

Analog/RS485/RS232

Description: The power supply output properties can be adjusted according to application need

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Technical Support

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