SS III Series of DC Pulse Magnetron Sputtering Power Supply

SS III Series of DC Pulse Magnetron Sputtering Power Supply

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Technical Specification of DC Pulse Magnetron Sputtering Power Supply, SS III Series

SS III series of magnetron sputtering power supply works in two-stage high frequency conversion mode with unipolar output mode, independent adjustment of the current supplied and the pulse width. When it works in pulse mode, the sputtering target works in high frequency intermittent state, enabling the stored charge on surface of the target to have certain discharging time. This is beneficial to restrain arc discharge and surface poisoning of the target, suitable for reaction sputtering film.

Power Range

6-120kW

Input Power

AC380V±10%, three phase four wire system, 50-60Hz

Output Mode

Pulse

Pulse Width

10-90%

Output Voltage

No load 1000V [peak voltage]

Output Features

Constant current / constant power / constant voltage

Arc extinguishing time

≤3μs

Output Stability

0.5%

Cooling Mode

6-12kW air-cooled; 20-120kW water-cooled

Service Environment

Ambient Temperature 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive flammable gas, good ventilation

Cooling Water

Clean without any minerals and other soluble substances
Water Temperature 20-40℃
Pressure 0.15±0.05MPa

Communication Mode

Analog/RS485/RS232

Description: The power supply output properties can be adjusted according to application need

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