SS II Series of DC Magnetron Sputtering Power Supply

SS II Series of DC Magnetron Sputtering Power Supply

规格参数

Technical Specification of DC Magnetron Sputtering Power Supply, SS II Series

SS II series of magnetron sputtering power supply works in high frequency conversion mode, with DC output; the supply current adjustment is achieved by changing the pulse width of the high frequency conversion. The power supply has good load characteristics with high cost performance ratio, suitable for metals and partial reaction layer environment.

Power Range

2-120 kW

Input Power

AC380V±10%, three phase four wire system, 50-60Hz

Output Mode

DC

Output Voltage

No load 900V

Output Features

Constant current / constant power / constant voltage

Arc extinguishing time

≤20μs

Output  Stability

0.5%

Cooling Mode

2-12kW air-cooled; 20-120kW water-cooled

Service Environment

Ambient Temperature 0-40℃
Ambient Humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive flammable gas, good ventilation

Cooling Water

Clean without any minerals and other soluble substances
Water Temperature 20-40℃
Pressure 0.15±0.05MPa

Communication Mode

Analog/RS485/RS232

Description: The power supply output properties can be adjusted according to application need

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Technical Support

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