SSPH Series of High Power Pulse Magnetron Sputtering Power Supply

SSPH Series of High Power Pulse Magnetron Sputtering Power Supply

规格参数

Technical Specification of High Power Pulse Magnetron Sputtering Power Supply, SSPH Series

SSPH series of high power pulse magnetron sputtering (HPPMS) power supply works in two-stage high frequency conversion mode with DC pulse output. The power supply consists of two parts of power supply and pulse modulation; individual pulse can export 2-8 megawatt instantaneous power. Cathode material with high power density will generate high metal ionization rate, and free from target particles. The power supply is suitable for making film coating for metal tools and decorative coating.

 

Power Range

12-25kW

Input Power

AC380V±10%, three phase four wire system, 50-60Hz

Output Mode

DC/Narrow Pulse

Output Voltage

0-2000V

Output Current

1200A 2400A 3600A 4800A

Arc extinguishing time

≤3μs

Pulse Frequency

Max. 500 Hz

Load Sustainability

100%

Cooling Mode

Air-cooled

Service Environment

Ambient Temperature 0-40℃
Ambient Humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive flammable gas, good ventilation

Communication Mode

RS485/RS232

Description: The power supply output properties can be adjusted according to application need

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Technical Support

Convenient, fast and thoughtful service

Add.: 2000m to the south of Lihe Bridge, Jianshe Road South, Zunhua City, Hebei ProvinceTel.: +86 (0)315-6028868/ 6028898
Fax.: +86 (0)315-6028838  P.C.: 064202  Website: www.bovceed.com
E-mail: sash@sash.com.cn   sashcn@sash.com.cn