SSPH Series of High Power Pulse Magnetron Sputtering Power Supply

SSPH Series of High Power Pulse Magnetron Sputtering Power Supply


Technical Specification of High Power Pulse Magnetron Sputtering Power Supply, SSPH Series

SSPH series of high power pulse magnetron sputtering (HPPMS) power supply works in two-stage high frequency conversion mode with DC pulse output. The power supply consists of two parts of power supply and pulse modulation; individual pulse can export 2-8 megawatt instantaneous power. Cathode material with high power density will generate high metal ionization rate, and free from target particles. The power supply is suitable for making film coating for metal tools and decorative coating.


Power Range


Input Power

AC380V±10%, three phase four wire system, 50-60Hz

Output Mode

DC/Narrow Pulse

Output Voltage


Output Current

1200A 2400A 3600A 4800A

Arc extinguishing time


Pulse Frequency

Max. 500 Hz

Load Sustainability


Cooling Mode


Service Environment

Ambient Temperature 0-40℃
Ambient Humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive flammable gas, good ventilation

Communication Mode


Description: The power supply output properties can be adjusted according to application need

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