SST Series of Intermediate Frequency Magnetron Sputtering Power Supply

SST Series of Intermediate Frequency Magnetron Sputtering Power Supply

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Technical Specification of Intermediate Frequency Magnetron Sputtering Power Supply, SST Series

SST series of intermediate frequency magnetron sputtering power supply work in two-stage high frequency conversion mode, AC sinusoidal output 40kHz. Intermediate sputtering power supply makes two sputtering targets as load, two targets work alternatively. Therefore, each sputtering target has inverse voltage over half of the time during the work cycle, enabling the stored charge on the target surface to discharge sufficiently, beneficial to restrain arc discharge of the target materials and surface poisoning.

Power Range

2-120 kW

Input Power

AC380V±10%, three phase four wire system, 50-60Hz

Output Mode

Quasi-sine wave

Output Frequency

40kHz

Output Voltage

No load 1200V [effective value]

Output Features

Constant current / constant power / constant voltage

Arc extinguishing time

≤3μs

Output Stability

1%

Cooling Mode

2-10kW air-cooled; 20-120kW water-cooled

Service Environment

Ambient Temperature 0-40℃
Ambient Humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive flammable gas, good ventilation

Cooling Water

Clean without any minerals and other soluble substances
Water Temperature 20-40℃
Pressure 0.15±0.05MPa

Communication Mode

Analog/RS485/RS232

Description: The power supply output properties can be adjusted according to application need

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