Location:
Homepage
/
/
/
Manufacturing method of high-power pulsed magnetron sputtering power supply

Manufacturing method of high-power pulsed magnetron sputtering power supply
Top

  • Categories:Company news
  • Author:
  • Origin:
  • Time of issue:2021-11-09 10:17

Manufacturing method of high-power pulsed magnetron sputtering power supply
Top

  • Categories:Company news
  • Author:
  • Origin:
  • Time of issue:2021-11-09 10:17
Information

The high-power pulsed magnetron sputtering power supply works in the high-frequency conversion mode, and the adjustment of the DC output and the power supply current is realized by changing the pulse width of the high-frequency conversion. At present, the power supply used in magnetron sputtering film forming process is DC magnetron sputtering power supply, intermediate frequency magnetron sputtering power supply, unipolar pulsed magnetron sputtering power supply, high-power pulsed magnetron sputtering power supply has good load characteristics. , Cost-effective, suitable for use in metal and reactive film environments. The ion energy is only about a few electron volts, the formed plasma has a low dissociation rate and poor controllability. The sputtering materials are mainly neutral atoms/radicals. The sputtering mechanism is a kinetic energy power supply and the voltage range is below Ikv, which makes it difficult to optimize the deposition. The quality and performance of the film, then, let’s learn about the production method of the high-power pulsed magnetron sputtering power supply!

  

高功率脉冲磁控溅射电源

 

Although the energy level of general sputtering materials is only electron volts, the energy level of high-power pulsed magnetron sputtering materials is as large as 100 electron volts, so the big advantage is that it can coat high-density films without significantly increasing the substrate. surface temperature. It is necessary to develop a high-power magnetron sputtering power supply that meets the above technical requirements. High-power pulsed magnetron sputtering technology has become a frontier and hot spot in the field of magnetron sputtering research, but to achieve this technology, the power supply method uses ball gap switches and pulse forming lines, which has inherent shortcomings: the switch of ball gap switches The repetition frequency is as low as tens of Hz, with high repetition frequency and

High-power pulsed magnetron sputtering power supply is used for high-power magnetron sputtering power supply with a frequency of 100Hz; the opening and closing time of the ball gap switch cannot be controlled, and the trigger is difficult and unstable. Sometimes the trigger voltage is adjusted repeatedly according to different gap gas pressures And current; there is jitter, the pulse width cannot be adjusted, and the use of high-power magnetron sputtering power supplies has great limitations; the ball gap switch has a short life, large maintenance volume, low efficiency, and heavy weight, which is very important for the installation environment and Strict space requirements.

The purpose of the utility model is to address the shortcomings of the current technology. The utility model is realized through the following key technologies. One of the key technologies is to provide a fully digital high-power unipolar pulsed magnetron sputtering power supply with stable performance, high efficiency, simple structure and long life. Series resonant inverter charging power supply,

The following is a description of the main technical functions and characteristics of the high-power pulsed magnetron sputtering power supply:

1. Series resonant inverter charging power supply. The charging current at the end of charging is very small, and the impedance is driven by infinitely large. It is provided for constant voltage charging and the charging power supply with drastic current changes. A large power resistance is connected in series between the load and the charging power supply. There are many cases of current limiting. Therefore, because the storage network is a load with a drastic change in impedance, it is close to a short circuit at the beginning of charging, and the impedance is almost 0. The efficiency of the current limiting resistor heating charging power supply is low, the above-mentioned efficiency, and the bulk are huge. The bulky constant voltage charging method has been difficult to meet the practical application. With the increase of the repetition frequency of 50%, large and large magnetron sputtering power supply and the expansion of pulse power, it has the characteristics of constant current charging, small size, high efficiency and reliability. It has high performance, high power density, and is not afraid of short circuits. It is suitable for loads with a wide range of impedance changes and is an ideal charging power source. In this regard, the technical route of the utility model-series resonant inverter charging power supply is proposed. Full digital high output unipolar pulsed magnetron sputtering power supply, including solid semiconductor switches composed of EMI filter circuit, three-phase bridge rectifier circuit, low frequency DC filter circuit, series resonant inverter charging circuit, power storage circuit, and IGBT And DSP digital signal processing circuit; The input end of the EMI filter circuit is the total input end, the output end of the three-phase bridge rectifier circuit is connected to the input end of the low-frequency DC filter circuit, and the three-phase five-wire AC power supply is connected to the output end Connect the input end of the three-phase bridge rectifier circuit; The output end of the low-frequency DC filter circuit is connected to the input end of the series resonant inverter charging circuit; The output end of the solid semiconductor switch composed of IGBT is the total output end, and the series resonant inverter charging The output terminal of the circuit is connected to the input terminal of the storage circuit via a high-frequency step-up transformer (t), a solid semiconductor switch composed of IGBT is connected to the output terminal of the storage circuit, and the DSP digital signal processing circuit is respectively connected to the functional circuit Make communication connections. High-power pulsed magnetron sputtering power supply

3. Series resonant inverter charging circuit: It has a resonant full bridge composed of a series capacitor CX, an inductor LX, and 4 IGBTs. The center of the resonant full bridge is the output terminal, and the resonant capacitor and the input terminal of the step-up transformer are used for DC filtering. The device is connected to the collector of the IGBT 1. An all-digital high-output unipolar pulsed magnetron sputtering power supply, characterized in that the emitter is directly connected to the output of the low-frequency DC filter circuit as a negative terminal, and the grid is connected with a DSP digital signal deal with

4. In the all-digital high-output unipolar pulsed magnetron sputtering power supply, the structure of the storage circuit constitutes an inverted l-type storage network composed of the storage capacity CD1, LD1 and CD1 of the storage inductor LDp, The connection point is the output end, the storage inductor LD1

Detailed ways

High-power pulse magnetron sputtering power supply is mainly composed of EMI filter circuit, three-phase bridge rectifier circuit, DC filter circuit, series resonant inverter charging circuit, energy storage circuit, solid semiconductor switch composed of IGBT, etc.

Abstract This utility model provides an all-digital high-output unipolar pulsed magnetron sputtering power supply, which uses DSP high-speed digital signal processing circuit to coordinate and control various functional circuits, including EMI filter circuit, three-phase bridge rectifier circuit, Low-frequency DC filter circuit, series resonant inverter circuit, energy storage circuit, solid semiconductor switch composed of IGBT and DSP digital signal processing circuit. The utility model has stable performance, high efficiency and simple structure, so that high-power unipolar pulsed magnetron sputtering The power supply works in an orderly and reliable manner, ensuring the stability and uniformity of the film quality, and improving the frequency and power of the high-power pulse power supply.

The above is the production method of high-power pulsed magnetron sputtering power supply, if you need to know more, please feel free to contact us!

Keyword:

Relevant information

Manufacturing method of DC magnetron sputtering power supply
The DC magnetron sputtering power supply works in the high frequency conversion mode. The DC output and the adjustment of the power supply current are realized by changing the pulse width of the high frequency conversion. Then, let's learn about the production method of the DC magnetron sputtering power supply!
MORE
The DC magnetron sputtering power supply works in the high frequency conversion mode. The DC output and the adjustment of the power supply current are realized by changing the pulse width of the high frequency conversion. Then, let's learn about the production method of the DC magnetron sputtering power supply!
The working principle and mode of high-power pulsed magnetron sputtering power supply
The high-power pulsed magnetron sputtering power supply uses a rectangular wave voltage pulsed power supply instead of the traditional DC power supply for magnetron sputtering deposition. The high-power pulsed magnetron sputtering power supply technology can effectively suppress the generation of arcs, eliminate the resulting film defects, and at the same time increase the sputtering deposition speed, reduce the deposition temperature and a series of significant advantages, then, let's understand the next high How does the power pulse magnetron sputtering power supply work!
MORE
The high-power pulsed magnetron sputtering power supply uses a rectangular wave voltage pulsed power supply instead of the traditional DC power supply for magnetron sputtering deposition. The high-power pulsed magnetron sputtering power supply technology can effectively suppress the generation of arcs, eliminate the resulting film defects, and at the same time increase the sputtering deposition speed, reduce the deposition temperature and a series of significant advantages, then, let's understand the next high How does the power pulse magnetron sputtering power supply work!
Manufacturing method of high-power pulsed magnetron sputtering power supply
Magnetron sputtering film forming process uses DC magnetron sputtering power supply, intermediate frequency magnetron sputtering power supply, unipolar pulse magnetron sputtering power supply, sputtering materials are mainly neutral atoms/radicals, sputtering The mechanism is that the voltage range of the kinetic energy power supply is below Ikv, and the ion energy is only about a few electron volts. The formed plasma has a low dissociation rate and poor controllability. It is difficult to optimize the quality and performance of the deposited film. How to make a sputtering power supply!
MORE
Magnetron sputtering film forming process uses DC magnetron sputtering power supply, intermediate frequency magnetron sputtering power supply, unipolar pulse magnetron sputtering power supply, sputtering materials are mainly neutral atoms/radicals, sputtering The mechanism is that the voltage range of the kinetic energy power supply is below Ikv, and the ion energy is only about a few electron volts. The formed plasma has a low dissociation rate and poor controllability. It is difficult to optimize the quality and performance of the deposited film. How to make a sputtering power supply!
The company successfully passed the ISO9001:2008 quality system certification

On June 18, 2015, our company successfully passed the ISO9001:2008 quality system certification. Through this quality system certification, our company will continue to work hard to meet the following requirements:

1. Strengthen the customer-centered concept, clearly understand customer requirements, meet customer requirements or even exceed customer requirements through the operation of each process in the system, and obtain customer satisfaction procedures through customer satisfaction measurement, so as to continuously improve the company’s Position in the hearts of customers and improve higher-quality services;

2. It is clearly required that the company’s management directly participate in the quality management system activities, formulate quality policies and quality objectives, and take timely measures for system deficiencies, which strengthened the company’s development in all aspects

3. Clarify the responsibilities of various functions and levels of personnel, and clarify the competence requirements of various personnel in terms of education, training, skills and experience, to ensure that all employees participate in the establishment, operation and maintenance of the entire quality system, and ensure The smooth operation of all aspects of the company;

4. Clearly control each link of the unqualified products in the production process, deal with the unqualified products produced, and through institutionalized data analysis, find the root cause of the unqualified products, and prevent the occurrence of unqualified products through corrective or preventive measures. Reoccurred, thereby continuously reducing the cost of poor quality incurred by the company, and continuously improving the effectiveness and efficiency of the quality management system through other continuous improvement activities  

5. The successful establishment of the ISO9001 quality system makes the company's development further, and we will continue to work hard to create more wealth and glory for the vacuum industry.

MORE

On June 18, 2015, our company successfully passed the ISO9001:2008 quality system certification. Through this quality system certification, our company will continue to work hard to meet the following requirements:

1. Strengthen the customer-centered concept, clearly understand customer requirements, meet customer requirements or even exceed customer requirements through the operation of each process in the system, and obtain customer satisfaction procedures through customer satisfaction measurement, so as to continuously improve the company’s Position in the hearts of customers and improve higher-quality services;

2. It is clearly required that the company’s management directly participate in the quality management system activities, formulate quality policies and quality objectives, and take timely measures for system deficiencies, which strengthened the company’s development in all aspects

3. Clarify the responsibilities of various functions and levels of personnel, and clarify the competence requirements of various personnel in terms of education, training, skills and experience, to ensure that all employees participate in the establishment, operation and maintenance of the entire quality system, and ensure The smooth operation of all aspects of the company;

4. Clearly control each link of the unqualified products in the production process, deal with the unqualified products produced, and through institutionalized data analysis, find the root cause of the unqualified products, and prevent the occurrence of unqualified products through corrective or preventive measures. Reoccurred, thereby continuously reducing the cost of poor quality incurred by the company, and continuously improving the effectiveness and efficiency of the quality management system through other continuous improvement activities  

5. The successful establishment of the ISO9001 quality system makes the company's development further, and we will continue to work hard to create more wealth and glory for the vacuum industry.

Biaoxian has always focused on electronic equipment in the field of surface treatment of materials such as vacuum plasma and electrochemistry
Over the years, Biaoxian has always focused on the research of electronic equipment and related processes in the field of surface treatment of materials such as vacuum plasma and electrochemistry. Adhering to technological innovation to promote product renewal has effectively enhanced the company's leading position in this field. At present, the company can produce nine categories, more than 70 types of power products and electronic equipment, of which the peak power of high-power pulse power has been extended to the megawatt level. The company has obtained 18 national patents, one of which is an invention patent, and has passed the ISO9001:2015 quality management system certification. With the growth of the company's R&D team and dedicated efforts, the company will continue to launch a new generation of products.
MORE
Over the years, Biaoxian has always focused on the research of electronic equipment and related processes in the field of surface treatment of materials such as vacuum plasma and electrochemistry. Adhering to technological innovation to promote product renewal has effectively enhanced the company's leading position in this field. At present, the company can produce nine categories, more than 70 types of power products and electronic equipment, of which the peak power of high-power pulse power has been extended to the megawatt level. The company has obtained 18 national patents, one of which is an invention patent, and has passed the ISO9001:2015 quality management system certification. With the growth of the company's R&D team and dedicated efforts, the company will continue to launch a new generation of products.
More than ten years of experience in vacuum coating power supply manufacturing
Biaoxian Electronics is a high-tech enterprise integrating R&D, manufacturing, and marketing. In 2014, it was rated as a high-tech enterprise in Hebei Province, and in 2017 and 2020, it was continuously rated as a high-tech enterprise in Hebei Province. The company's predecessor was the Zunhua City Sanshi Electronic Technology Research Institute founded in 2001, with more than ten years of manufacturing history of vacuum coating power supplies. The company is located in the Yanshan Nanyuan-Zunhua city with superior geographical location, convenient transportation and beautiful environment. The company covers an area of 12,000 square meters and has more than 50 employees, of which product developers account for 30%. The company's products have been distributed throughout the country and are exported to all parts of the world.
MORE
Biaoxian Electronics is a high-tech enterprise integrating R&D, manufacturing, and marketing. In 2014, it was rated as a high-tech enterprise in Hebei Province, and in 2017 and 2020, it was continuously rated as a high-tech enterprise in Hebei Province. The company's predecessor was the Zunhua City Sanshi Electronic Technology Research Institute founded in 2001, with more than ten years of manufacturing history of vacuum coating power supplies. The company is located in the Yanshan Nanyuan-Zunhua city with superior geographical location, convenient transportation and beautiful environment. The company covers an area of 12,000 square meters and has more than 50 employees, of which product developers account for 30%. The company's products have been distributed throughout the country and are exported to all parts of the world.
 标先

Service

consultation

 标先

Technical

consultation

 标先

Sales

service

 标先

After-sales

service

Add.: 2000m to the South of Lihe Bridge, Jianshe South Road, Zunhua City, Hebei Province

Tel:+86 (0315) 6028838 / 6028868 / 6028898

Website:www.bovceed.com

24H Service Hotline:+86 135 8252 6663

E-mail:sash@sash.com.cn / sashcn@sash.com.cn

Copyright © 2021 BOVCEED All rights reserved 冀ICP备19010580号-2 01

Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms