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BOMB IV series
BOMB IV combination
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Technical Specifications of Bias Power Supply, BOMB IV Series |
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BOMB-IV series of bias power supply works in high frequency secondary conversion mode in three output modes, including positive and negative bipolar pulse, reverse unipolar pulse and reverse DC. The positive voltage of the power supply is adjusted with movement, and the frequency and duty cycle are adjusted independently. Since the power supply output has bipolar characteristics, it can suppress the firing phenomenon caused by the accumulated charge on the workpiece surface, and change the rules of film deposition, and have a certain adjustment effect on the film color, which is more suitable for the mass production of TiC film layer with high resistivity. The voltage and duty cycle can be adjusted separately to achieve high voltage and low temperature deposition, and the power supply is suitable for a variety of applications such as temperature sensitive workpieces and special color film layer production, or process development. |
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Power Range |
50KW/60KW/80KW/90KW/100KW /120KW /160KW /180KW |
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Sub-supply Power |
6KW/12KW/20/30/40 KW |
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Input power |
Three-phase four-wire system 380V±10％50-60Hz |
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Output Mode |
Bipolar pulse / reverse unipolar pulse / reverse DC |
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Pulse Frequency |
40KHz |
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Pulse Duty Cycle |
0-100% continuous adjustment |
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Output Voltage |
0-220V 0-660V [DC/Pulse peak voltage] |
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Sub-supply Output Voltage |
DC 0-120V |
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Arc Extinguishing Time |
≤1uS |
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Output Accuracy |
Better than 2% |
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Cooling Mode |
Water-cooled |
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Auxiliary Function |
High temperature, condensation alarm |
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Service Environment |
Ambient temperature: 0-40℃ |
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Cooling water |
Clean without any minerals and other soluble substances |
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Communication Mode |
Analog/RS485/RS232 |
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Note: The output characteristics of the power supply can be adjusted according to the needs of use. |
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms
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