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BOMB- III series
BOMB IIID
Technical Specifications of Bias Power Supply, BOMB- IIIH Series |
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BOMB- IIIH series of bias power supply works in two-stage high frequency conversion mode, with unipolar pulse mode on the output, and pulse duty cycle 10-90%. Because the output voltage and pulse width of the power supply adopt independent adjustment, the workpiece temperature rise is controlled by changing the pulse width, in the same time to meet the required technological voltage. The power supply is applicable to film coating of various tools and decorative coating. |
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Power Range |
3/6/12/20/30/50/40/60/80/100/120/160/200KW |
Input Power |
Three-phase four-wire system, 380V±10%50-60Hz |
Output Mode |
Pulse |
Pulse Frequency |
40KHZ |
Pulse Duty Cycle |
10-90% |
Output Voltage |
0-180V 0-500V 0-1000V [peak voltage] |
Arc Extinguishing Time |
≤1uS |
Output Accuracy |
Better than 2% |
Cooling Mode |
3-12KW air-cooled, 20-200KW Water-cooled |
Auxiliary Function |
High temperature, condensation alarm (refer to water-cooled types only) |
Service Environment |
Ambient temperature: 0-40℃ |
Cooling Water |
Clean without any minerals and other soluble substances |
Communication Mode |
Analog/RS485/RS232 |
Note: The output characteristics of the power supply can be adjusted according to the needs of use. |
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms