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SS II series

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SS II X

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SS II X
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Technical Specification of DC Magnetron Sputtering Power Supply, SS-II Series

SS- II series of magnetron sputtering power supply works in high frequency conversion mode, with DC output; the supply current adjustment is achieved by changing the pulse width of the high frequency conversion. The power supply has good arc control ability and load characteristics with high cost performance ratio, suitable for metals and partial reaction layer environment. 

Power Range

3/6/12/20/30/40/60/80/100/120KW

Input power

Three-phase four-wire system 380V±10%50-60Hz

Output Mode

DC

Output Voltage

No load 800V

Output Characteristics

Constant current / constant power / constant voltage

Arc Extinguishing Time

≤20uS

Output Accuracy

Better than 1%

Cooling Mode

3-12KW air-cooled; 20-120KW water-cooled

Auxiliary Function

High temperature, condensation alarm, short circuit, open-circuit instruction and signal output (High temperature, condensation alarm refer to water-cooled types only)

Service Environment

Ambient temperature: 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive and flammable gas, good ventilation

Cooling Water

Clean without any minerals and other soluble substances
Water temperature 20-30℃
Pressure 0.15±0.05Mpa

Communication Mode

Analog/RS485/RS232

Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms