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SST series

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SSTD

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Technical Specification of Intermediate Frequency AC Magnetron Sputtering Power Supply, SST Series

SST series of intermediate frequency magnetron sputtering power supply work in two-stage high frequency conversion mode, AC sinusoidal output 40kHz. Intermediate sputtering power supply makes two sputtering targets as load, two targets work alternatively. Therefore, each sputtering target has inverse voltage over half of the time during the work cycle, enabling the stored charge on the target surface to discharge sufficiently, beneficial to restrain arc discharge of the target materials and surface poisoning.  

Power Range

3/6/12/20/30/40/60/80/100/120KW

Input power

Three-phase four-wire system 380V±10%50-60Hz

Output Current

AC sine wave

Output Frequency

40KHz

Output Voltage

No load 1200V [effective value]

Output Characteristics

Constant current / constant power / constant voltage

Arc Extinguishing Time

≤0.5uS

Output Accuracy

Better than 1%

Cooling Mode

3-12KW air-cooled; 20-120KW water-cooled

Auxiliary Function

High temperature, condensation alarm, short circuit, open-circuit instruction and signal output (High temperature, condensation alarm refer to water-cooled types only)

Service Environment

Ambient temperature: 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive and flammable gas, good ventilation

Cooling Water

Clean without any minerals and other soluble substances
Water temperature 20-30℃
Pressure 0.15±0.05Mpa

Communication Mode

Analog/RS485/RS232

Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms