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Magnetron sputtering power supply

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SST

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SSTD

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Bias power supply 
- BOMB IA
- BOMB III
- BOMB IV
- BIV-40/60
- BOMB VS
Magnetron sputtering power supply 
- SS II
- SS III
- SST
- SSDH
- SSPH
Arc power supply 
- SAL
- SAZ
Multi-arc magnetic field power supply 
- SAMD
Ion source power supply 
- SIC-I
- SIC-II
Hollow cathode power supply 
- SHC II
Bombard cleaning power supply 
- SCA
Plasma polishing power supply 
- SPI-N
Gas flow control power supply 
- FLOW

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SST series

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SSTD

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Description

Parameters

Technical Specification of Intermediate Frequency AC Magnetron Sputtering Power Supply, SST Series
SST series of intermediate frequency magnetron sputtering power supply work in two-stage high frequency conversion mode, AC sinusoidal output 40kHz. Intermediate sputtering power supply makes two sputtering targets as load, two targets work alternatively. Therefore, each sputtering target has inverse voltage over half of the time during the work cycle, enabling the stored charge on the target surface to discharge sufficiently, beneficial to restrain arc discharge of the target materials and surface poisoning.
Power Range	3/6/12/20/30/40/60/80/100/120KW
Input power	Three-phase four-wire system 380V±10％50-60Hz
Output Current	AC sine wave
Output Frequency	40KHz
Output Voltage	No load 1200V [effective value]
Output Characteristics	Constant current / constant power / constant voltage
Arc Extinguishing Time	≤0.5uS
Output Accuracy	Better than 1%
Cooling Mode	3-12KW air-cooled; 20-120KW water-cooled
Auxiliary Function	High temperature, condensation alarm, short circuit, open-circuit instruction and signal output (High temperature, condensation alarm refer to water-cooled types only)
Service Environment	Ambient temperature: 0-40℃ Ambient humidity: Relative humidity ≤85% Clean air, no dust, no corrosive and flammable gas, good ventilation
Cooling Water	Clean without any minerals and other soluble substances Water temperature 20-30℃ Pressure 0.15±0.05Mpa
Communication Mode	Analog/RS485/RS232
Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Add.: 2000m to the South of Lihe Bridge, Jianshe South Road, Zunhua City, Hebei Province

Tel：+86 (0315) 6028838 / 6028868 / 6028898

Website：www.bovceed.com

24H Service Hotline：+86 135 8252 6663

E-mail：sash@sash.com.cn / sashcn@sash.com.cn

Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms

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