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SIC-I
SIC-I

Island SIC-I

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IslandSIC-I

Phone:+86 135 8252 6663

Product Description

Technical Specification of Ion Source Power Supply, SIC- I Series

SIC- I series of ion source power supply is used as a working power for Hall ion source, providing filament supply and anode supply required by the work. Both the filament supply and the anode supply of SIC I series of ion source power supply have applied the switching mode, with good stability and high working efficiency. 

Power

Filament supply 1.5kW, anode supply 5kW

Input Power

Three-phase four-wire system 380V±10％50-60Hz

Filament Supply

Output voltage AC36V

 

Output current AC40A

Anode Supply

Output voltage DC300V no load

 

Output current DC20A

Output Current Accuracy

Better than 1%

Cooling Mode

Air-cooled

Service Environment

Ambient temperature: 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive and flammable gas, good ventilation

Communication Mode

Analog

Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Pre sales consultation

Pre sales consultation

Sales service

Sales service

After sales service 2

After sales service

Add.: 2000m to the South of Lihe Bridge, Jianshe South Road, Zunhua City, Hebei Province

Tel：+86 (0315) 6028838 / 6028868 / 6028898

Website：www.bovceed.com

24H Service Hotline：+86 135 8252 6663

E-mail：sash@sash.com.cn / sashcn@sash.com.cn

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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms

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