SSDH series

Description

Technical Specification of Intermediate Frequency AC Magnetron Sputtering Power Supply, SSDH Series

SSDH series of intermediate frequency magnetron sputtering power supply work in two-stage high frequency conversion mode, AC sinusoidal output. The power output frequency can be set to 100, 125, 150, 175, 200 kHz, or 200, 250, 350, 400 kHz, for the deposition of compound film, and related technological development. 

Power Range

2-20KW

Input power

Three-phase four-wire system 380V±10％50-60Hz

Output Mode

AC sine wave

Output Frequency

100, 125, 150, 175, 200KHZ or 200, 250, 350, 400 KHZ

Output Voltage

No load 1000V [effective value]

Output Characteristics

Constant current / constant power / constant voltage

Arc Extinguishing Time

≤0.5uS

Output Stability

Better than 0.5%

Cooling Mode

Air-cooled

Service Environment

Ambient temperature: 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive and flammable gas, good ventilation

Communication Mode

Analog/RS485/RS232

Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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