Description

SSIV Series Bipolar Pulse Magnetron Sputtering Power Supply Technical Specifications

The SSIV series bipolar pulse magnetron sputtering power supply operates in a secondary high-frequency conversion mode, with bipolar pulse output, and the current and pulse width of the power supply can be adjusted independently. The SSIV series bipolar pulse magnetron sputtering power supply sends a reversal pulse of about 100V to the magnetron sputtering target immediately after a sputtering pulse ends, actively neutralizing the accumulated charge on the target material surface, thereby inhibiting the occurrence of target surface arcs and avoiding target material particles contaminating the coating. Due to the above features, the SSIV series bipolar pulse magnetron sputtering is particularly suitable for high-end reactive film layer sputtering deposition.

Power Supply Power Range

5/10/20/30/40KW

Input Power Supply

Three-phase four-wire system 380V±10%, 50-60Hz

Output Mode

Bipolar Pulse

Pulse Frequency

1-150KHz

Pulse Duty Cycle

40-90％

Output Voltage

No-load 1000V [peak voltage]

Reverse Voltage

100V

Output Characteristics

Constant Current / Constant Power / Constant Voltage

Arc Quenching Time

≤1uS

Output Accuracy

Better than 1%

Cooling Method

air-cooled; 20-40KW water-cooled

Assistive Features

High temperature, condensation, short circuit, open circuit indication, and signal output (high temperature and condensation are limited to water-cooled models).

Operating Environment

Ambient temperature: 0-40℃

Ambient humidity: Relative humidity ≤ 85%

Air cleanliness: No dust, non-corrosive, non-flammable gases, good ventilation

Cooling Water

Cleanliness: Free from minerals and other soluble substances

Water temperature: 20-30℃

Pressure: 0.15±0.05Mpa

Communication Mode

Analog/RS485/RS232

The output characteristics of the power supply can be adjusted according to the needs of the user.

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