Description

SSIII2 Series DC Pulse Magnetron Sputtering Power Supply Technical Specifications

The SSIII2 series magnetron sputtering power supplies operate in a secondary high-frequency conversion mode, delivering output in a unipolar pulse manner, with independently adjustable current and pulse width. When operating in pulse mode, the sputtering target works at a high-frequency intermittent state, which allows certain discharge time for accumulated charge on the target surface, beneficial for suppressing target arcing and reducing contamination of the coating by target particles. The SSIII2 series magnetron sputtering power supply can output pulse frequencies up to 400 KHz, greatly suppressing the energy of target arcing and reducing target particles, effectively improving the compactness of the film layer. The power supply is suitable for high-end metal film and reactive film sputtering deposition.

Power Supply Power Range

5/10/20/30/40KW

Input Power Supply

Three-phase four-wire system 380V±10% 50-60Hz

Output Mode

Unipolar Pulse

Pulse Frequency

100-400KHz

Pulse Duty Cycle

40-90％

Output Voltage

 No-load 1000V [peak voltage]

Output Characteristics

Constant Current / Constant Power / Constant Voltage

Arc Extinguishing Time

≤1uS

Output Accuracy

Better than 1%

Cooling Method

5-10KW air-cooled; 20-40KW water-cooled

Assistive Features

High temperature, condensation, short circuit, open circuit indication and signal output (high temperature, condensation, limited to water-cooled models)

Operating Environment Conditions

Environmental Temperature: 0-40°C

Environmental Humidity: Relative humidity ≤85%

Air Cleanliness: No dust, no corrosive or flammable gases, well ventilated

Cooling Water

Cleanliness: Free from minerals and other soluble substances

Water Temperature: 20-30°C

Pressure: 0.15±0.05Mpa

Communication Method

Analog/RS485/RS232

The output characteristics of the power supply can be adjusted according to user requirements.

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