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SS II series
Description
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Technical Specification of DC Magnetron Sputtering Power Supply, SS-II Series |
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SS- II series of magnetron sputtering power supply works in high frequency conversion mode, with DC output; the supply current adjustment is achieved by changing the pulse width of the high frequency conversion. The power supply has good arc control ability and load characteristics with high cost performance ratio, suitable for metals and partial reaction layer environment. |
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Power Range |
3/6/12/20/30/40/60/80/100/120KW |
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Input power |
Three-phase four-wire system 380V±10％50-60Hz |
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Output Mode |
DC |
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Output Voltage |
No load 800V |
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Output Characteristics |
Constant current / constant power / constant voltage |
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Arc Extinguishing Time |
≤20uS |
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Output Accuracy |
Better than 1% |
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Cooling Mode |
3-12KW air-cooled; 20-120KW water-cooled |
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Auxiliary Function |
High temperature, condensation alarm, short circuit, open-circuit instruction and signal output (High temperature, condensation alarm refer to water-cooled types only) |
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Service Environment |
Ambient temperature: 0-40℃ |
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Cooling Water |
Clean without any minerals and other soluble substances |
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Communication Mode |
Analog/RS485/RS232 |
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Note: The output characteristics of the power supply can be adjusted according to the needs of use. |
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms