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SS II

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SS II

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Bias power supply 
- BOMB IA
- BOMB III
- BOMB IV
- BIV-40/60
- BOMB VS
Magnetron sputtering power supply 
- SS II
- SS III
- SST
- SSDH
- SSPH
Arc power supply 
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- SAZ
Multi-arc magnetic field power supply 
- SAMD
Ion source power supply 
- SIC-I
- SIC-II
Hollow cathode power supply 
- SHC II
Bombard cleaning power supply 
- SCA
Plasma polishing power supply 
- SPI-N
Gas flow control power supply 
- FLOW

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SS II series

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SS II

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Description

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Technical Specification of DC Magnetron Sputtering Power Supply, SS-II Series
SS- II series of magnetron sputtering power supply works in high frequency conversion mode, with DC output; the supply current adjustment is achieved by changing the pulse width of the high frequency conversion. The power supply has good arc control ability and load characteristics with high cost performance ratio, suitable for metals and partial reaction layer environment.
Power Range	3/6/12/20/30/40/60/80/100/120KW
Input power	Three-phase four-wire system 380V±10％50-60Hz
Output Mode	DC
Output Voltage	No load 800V
Output Characteristics	Constant current / constant power / constant voltage
Arc Extinguishing Time	≤20uS
Output Accuracy	Better than 1%
Cooling Mode	3-12KW air-cooled; 20-120KW water-cooled
Auxiliary Function	High temperature, condensation alarm, short circuit, open-circuit instruction and signal output (High temperature, condensation alarm refer to water-cooled types only)
Service Environment	Ambient temperature: 0-40℃ Ambient humidity: Relative humidity ≤85% Clean air, no dust, no corrosive and flammable gas, good ventilation
Cooling Water	Clean without any minerals and other soluble substances Water temperature 20-30℃ Pressure 0.15±0.05Mpa
Communication Mode	Analog/RS485/RS232
Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Add.: 2000m to the South of Lihe Bridge, Jianshe South Road, Zunhua City, Hebei Province

Tel：+86 (0315) 6028838 / 6028868 / 6028898

Website：www.bovceed.com

24H Service Hotline：+86 135 8252 6663

E-mail：sash@sash.com.cn / sashcn@sash.com.cn

Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms

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