Description

SST2 series medium frequency AC magnetron sputtering power supply technical specifications

 The SST2 series medium-frequency magnetron sputtering power source operates in a two-stage high-frequency conversion mode, with an AC output frequency of 400KHz. The medium-frequency sputtering power source uses two magnetron sputtering targets as the load, with the targets working alternately. Therefore, for more than half of a sputtering cycle, a reverse voltage cut-off sputtering occurs, which allows the accumulated charge on the target surface to be fully discharged. This is beneficial for suppressing target arc discharge and surface poisoning, making it especially suitable for the deposition of reactive film layers. The SST2 series medium-frequency magnetron sputtering power source outputs at a frequency of 400KHz, and the higher frequency increases the switching rate of dual-target operation, deeply suppressing the accumulation of charge and arc energy, resulting in a significant improvement in the quality of the reactive film layer.

Power Supply Power Range

5/10/20/30KW

Input Power Supply

Three-phase four-wire system 380V±10% 50-60Hz

Output Mode

Alternating sine wave

Pulse Frequency

400KHz

Output Voltage

No-load 1000V [peak voltage]

Output Characteristics

Constant Current / Constant Power / Constant Voltage

Arc Extinguishing Time

≤0.5uS

Output Accuracy

Better than 1%

Cooling Method

5-10KW air-cooled; 20-40KW water-cooled

Assistive Features

High temperature, condensation, short circuit, open circuit indication and signal output (high temperature, condensation, limited to water-cooled models)

Operating Environment Conditions

Environmental Temperature: 0-40°C

Environmental Humidity: Relative humidity ≤85%

Air Cleanliness: No dust, no corrosive or flammable gases, well ventilated

Cooling Water

Cleanliness: Free from minerals and other soluble substances

Water Temperature: 20-30°C

Pressure: 0.15±0.05Mpa

Communication Method

Analog/RS485/RS232

The output characteristics of the power supply can be adjusted according to user requirements.

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