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SIC-II

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SIC-II

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Bias power supply 
- BOMB IA
- BOMB III
- BOMB IV
- BIV-40/60
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Magnetron sputtering power supply 
- SS II
- SS III
- SST
- SSDH
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Arc power supply 
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- SAZ
Multi-arc magnetic field power supply 
- SAMD
Ion source power supply 
- SIC-I
- SIC-II
Hollow cathode power supply 
- SHC II
Bombard cleaning power supply 
- SCA
Plasma polishing power supply 
- SPI-N
Gas flow control power supply 
- FLOW

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SIC-II series

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SIC-II

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SIC-II

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Description

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Technical Specifications of Anode Layer Ion Source Power Supply, SIC- II Series
SIC-II series of ion source power supply is used as a working power for anode layer ion source, providing anode voltage required by different working stage. SIC II series ion source power applies high frequency switching mode, with good stability and high work efficiency.
Power	15KW
Input Power	Three-phase four-wire system 380V±10％50-60Hz
Anode Supply Voltage	DC 0-1000V, DC 0-3000V
Anode Supply Current	DC0-15A,0-5A
Output Characteristics	Constant current / constant voltage
Output Current Accuracy	Better than 1％
Cooling Mode	Air-cooled
Service Environment	Ambient temperature: 0-40℃ Ambient humidity: Relative humidity ≤85% Clean air, no dust, no corrosive and flammable gas, good ventilation
Communication Mode	Analog/RS485/RS232
Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Add.: 2000m to the South of Lihe Bridge, Jianshe South Road, Zunhua City, Hebei Province

Tel：+86 (0315) 6028838 / 6028868 / 6028898

Website：www.bovceed.com

24H Service Hotline：+86 135 8252 6663

E-mail：sash@sash.com.cn / sashcn@sash.com.cn

Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms

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