Technical Specifications of Anode Layer Ion Source Power Supply, SIC- II Series
SIC-II series of ion source power supply is used as a working power for anode layer ion source, providing anode voltage required by different working stage. SIC II series ion source power applies high frequency switching mode, with good stability and high work efficiency.
Three-phase four-wire system 380V±10％50-60Hz
Anode Supply Voltage
DC 0-1000V, DC 0-3000V
Anode Supply Current
Constant current / constant voltage
Output Current Accuracy
Better than 1％
Ambient temperature: 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive and flammable gas, good ventilation
Note: The output characteristics of the power supply can be adjusted according to the needs of use.
Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms