SHC II series

Description

Technical Specifications of Hollow Cathode Vacuum Plating Power Supply, SH-II Series

This power supply system is a power supply equipment that applies HCD (hollow thermionic cathode plasma electron beam evaporation) gun to realize metal materials evaporation; it applies high-frequency switching technology with highly integrated system, high efficiency and stable performance.

System Composition

Draught Beam Power

Induction power applied for hollow cathode plasma electron beam

Main Beam Power

Working power to enable the hollow cathode to generate plasma electron beam; the high density plasma electron beam bombards the target to make it evaporate

Focusing Power Supply

For focusing and deflecting the electron beam and correcting the position of the electron beam in relation to the target

Gun Beam Power Supply

For initial focusing of the electron beam of the electron gun

Service Requirement

Input Power          

Three-phase four-wire system 380V±10％50-60Hz

Service Environment

Ambient temperature: 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive and flammable gas, good ventilation

Cooling water

Clean without any minerals and other soluble substances
Water temperature 20-30℃
Pressure 0.15±0.05Mpa

Communication Mode

Analog/RS485/RS232

Performance Parameter of Main Beam Power Supply

Power Range

20/30KW

Output No Load Voltage

0-150V

Output Current Accuracy

Better than 1%

Cooling Mode

Water-cooled

Performance Parameter of Draught Beam Power Supply

Power Range

6/12KW

Output No Load Voltage

800V

Output Current accuracy

Better than 1%

Cooling Mode

Air-cooled     

Performance Parameter of Focusing Power Supply

Power Range

2KW

Output No Load Voltage

100V

Output Current Accuracy

Better than 1%

Cooling Mode

Air-cooled

Performance Parameter of Gun Beam Power Supply

Power Range

300W

Output No Load Voltage

15V

Output Current accuracy

Better than 1%

Cooling Mode

Air-cooled

Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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