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SHC II series
SHC II
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Technical Specifications of Hollow Cathode Vacuum Plating Power Supply, SH-II Series |
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This power supply system is a power supply equipment that applies HCD (hollow thermionic cathode plasma electron beam evaporation) gun to realize metal materials evaporation; it applies high-frequency switching technology with highly integrated system, high efficiency and stable performance. |
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System Composition |
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Draught Beam Power |
Induction power applied for hollow cathode plasma electron beam |
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Main Beam Power |
Working power to enable the hollow cathode to generate plasma electron beam; the high density plasma electron beam bombards the target to make it evaporate |
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Focusing Power Supply |
For focusing and deflecting the electron beam and correcting the position of the electron beam in relation to the target |
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Gun Beam Power Supply |
For initial focusing of the electron beam of the electron gun |
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Service Requirement |
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Input Power |
Three-phase four-wire system 380V±10％50-60Hz |
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Service Environment |
Ambient temperature: 0-40℃ |
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Cooling water |
Clean without any minerals and other soluble substances |
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Communication Mode |
Analog/RS485/RS232 |
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Performance Parameter of Main Beam Power Supply |
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Power Range |
20/30KW |
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Output No Load Voltage |
0-150V |
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Output Current Accuracy |
Better than 1% |
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Cooling Mode |
Water-cooled |
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Performance Parameter of Draught Beam Power Supply |
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Power Range |
6/12KW |
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Output No Load Voltage |
800V |
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Output Current accuracy |
Better than 1% |
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Cooling Mode |
Air-cooled |
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Performance Parameter of Focusing Power Supply |
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Power Range |
2KW |
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Output No Load Voltage |
100V |
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Output Current Accuracy |
Better than 1% |
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Cooling Mode |
Air-cooled |
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Performance Parameter of Gun Beam Power Supply |
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Power Range |
300W |
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Output No Load Voltage |
15V |
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Output Current accuracy |
Better than 1% |
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Cooling Mode |
Air-cooled |
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Note: The output characteristics of the power supply can be adjusted according to the needs of use. |
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Messages
Pre sales consultation
Sales
service
After sales service 1
After sales service 2
Add.: 2000m to the South of Lihe Bridge, Jianshe South Road, Zunhua City, Hebei Province
Tel：+86 (0315) 6028838 / 6028868 / 6028898
Website：www.bovceed.com
24H Service Hotline：+86 135 8252 6663
E-mail：sash@sash.com.cn / sashcn@sash.com.cn
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms
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