SSPH series

Description

Technical Specification of High Power Pulse Magnetron Sputtering Power Supply, SSPH Series

SSPH series of high power pulse magnetron sputtering (HPPMS) power supply works in two-stage high frequency conversion mode with DC pulse output. The individual pulse can export 2-8 megawatt instantaneous power. Cathode material with high power density will generate high metal ionization rate, and free from target particles. The fine binding force and compactness of the coating made by this series of power supply is suitable for making hard film coating and high end decorative coating.

Power Range

15/20/30/40KW

Input power

Three-phase four-wire system 380V±10％50-60Hz

Output Mode

Unipolar narrow pulse

Pulse Width

5-250uS

Pulse Frequency

500HZ max.

Output Voltage

No load 1000-2000V

Output Accuracy

1200A 2400A 3600A 4800A

Arc Extinguishing Time

≤1uS

No Load Sustainability

100%

Cooling Mode

Air-cooled

Service Environment

Ambient temperature: 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive and flammable gas, good ventilation

Communication Mode

Analog/RS485/RS232

Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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