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SSPH series
SSPH
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Technical Specification of High Power Pulse Magnetron Sputtering Power Supply, SSPH Series |
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SSPH series of high power pulse magnetron sputtering (HPPMS) power supply works in two-stage high frequency conversion mode with DC pulse output. The individual pulse can export 2-8 megawatt instantaneous power. Cathode material with high power density will generate high metal ionization rate, and free from target particles. The fine binding force and compactness of the coating made by this series of power supply is suitable for making hard film coating and high end decorative coating. |
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Power Range |
15/20/30/40KW |
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Input power |
Three-phase four-wire system 380V±10％50-60Hz |
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Output Mode |
Unipolar narrow pulse |
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Pulse Width |
5-250uS |
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Pulse Frequency |
500HZ max. |
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Output Voltage |
No load 1000-2000V |
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Output Accuracy |
1200A 2400A 3600A 4800A |
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Arc Extinguishing Time |
≤1uS |
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No Load Sustainability |
100% |
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Cooling Mode |
Air-cooled |
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Service Environment |
Ambient temperature: 0-40℃ |
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Communication Mode |
Analog/RS485/RS232 |
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Note: The output characteristics of the power supply can be adjusted according to the needs of use. |
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Sales
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After sales service 1
After sales service 2
Add.: 2000m to the South of Lihe Bridge, Jianshe South Road, Zunhua City, Hebei Province
Tel：+86 (0315) 6028838 / 6028868 / 6028898
Website：www.bovceed.com
24H Service Hotline：+86 135 8252 6663
E-mail：sash@sash.com.cn / sashcn@sash.com.cn
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms
+86-13582526663
sash@sash.com.cn
