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SS III series
Description
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Technical Specification of DC Magnetron Sputtering Power Supply, SS-III Series |
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SS -III series of magnetron sputtering power supply works in two-stage high frequency conversion mode with unipolar output mode, independent adjustment of the current supplied and the pulse width. When it works in pulse mode, the sputtering target works in high frequency intermittent state, enabling the stored charge on surface of the target to have certain discharging time. This is beneficial to restrain arc discharge and surface poisoning of the target, suitable for reaction sputtering film. |
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Power Range |
3/6/12/20/30/40/60/80/100/120KW |
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Input power |
Three-phase four-wire system 380V±10％50-60Hz |
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Output Mode |
Pulse |
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Pulse Frequency |
40KHZ |
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Pulse Duty Cycle |
10-90％ |
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Output Voltage |
No load 1000V [peak voltage] |
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Output Characteristics |
Constant current / constant power / constant voltage |
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Arc Extinguishing Time |
≤1uS |
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Output Accuracy |
Better than 1％ |
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Cooling Mode |
3-12KW air-cooled; 20-120KW water-cooled |
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Auxiliary Function |
High temperature, condensation alarm, short circuit, open-circuit instruction and signal output (High temperature, condensation alarm refer to water-cooled types only) |
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Service Environment |
Ambient temperature: 0-40℃ |
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Cooling Water |
Clean without any minerals and other soluble substances |
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Communication Mode |
Analog/RS485/RS232 |
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Note: The output characteristics of the power supply can be adjusted according to the needs of use. |
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms