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SS III

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SS III

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SS III series

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SS III

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Description

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Technical Specification of DC Magnetron Sputtering Power Supply, SS-III Series
SS -III series of magnetron sputtering power supply works in two-stage high frequency conversion mode with unipolar output mode, independent adjustment of the current supplied and the pulse width. When it works in pulse mode, the sputtering target works in high frequency intermittent state, enabling the stored charge on surface of the target to have certain discharging time. This is beneficial to restrain arc discharge and surface poisoning of the target, suitable for reaction sputtering film.
Power Range	3/6/12/20/30/40/60/80/100/120KW
Input power	Three-phase four-wire system 380V±10％50-60Hz
Output Mode	Pulse
Pulse Frequency	40KHZ
Pulse Duty Cycle	10-90％
Output Voltage	No load 1000V [peak voltage]
Output Characteristics	Constant current / constant power / constant voltage
Arc Extinguishing Time	≤1uS
Output Accuracy	Better than 1％
Cooling Mode	3-12KW air-cooled; 20-120KW water-cooled
Auxiliary Function	High temperature, condensation alarm, short circuit, open-circuit instruction and signal output (High temperature, condensation alarm refer to water-cooled types only)
Service Environment	Ambient temperature: 0-40℃ Ambient humidity: Relative humidity ≤85% Clean air, no dust, no corrosive and flammable gas, good ventilation
Cooling Water	Clean without any minerals and other soluble substances Water temperature 20-30℃ Pressure 0.15±0.05Mpa
Communication Mode	Analog/RS485/RS232
Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Add.: 2000m to the South of Lihe Bridge, Jianshe South Road, Zunhua City, Hebei Province

Tel：+86 (0315) 6028838 / 6028868 / 6028898

Website：www.bovceed.com

24H Service Hotline：+86 135 8252 6663

E-mail：sash@sash.com.cn / sashcn@sash.com.cn

Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms

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