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BOMB VS

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BOMB VS

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Bias power supply 
- BOMB IA
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- BOMB VS
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BOMB VS series

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BOMB VS

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BOMB VS

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Description

Parameters

Technical Specifications of Bias Power Supply, BOMB VS Series
BOMB VS series of bias power supply works in high frequency secondary conversion mode in three output modes, including unipolar pulse, DC superimposed pulse and low voltage DC, and with independent adjustment of primary supply voltage, secondary supply voltage and pulse width. The flexible output mode is suitable for various applications such as hard film layer, decorative film layer and process development. Especially, the DC superimposed pulse mode effectively maintains the continuous bias voltage while controlling the workpiece temperature, which is very beneficial for tool coating.
Power Range	40/50/60/80KW (excluding sub-supply)
Sub-supply Power	6KW/12KW
Input power	Three-phase four-wire system 380V±10％50-60Hz
Output Mode	Pulse / DC bias pulse / low-voltage DC
Pulse Frequency	40KHz
Pulse Duty Cycle	10-90%
Output Voltage	0-200V 0-500V 0-1000V [DC/peak voltage]
Sub-supply Output Voltage	DC0-100V
Arc Extinguishing Time	≤1uS
Output Accuracy	Better than 2%
Cooling Mode	Water-cooled
Auxiliary Function	High temperature, condensation alarm
Service Environment	Ambient temperature: 0-40℃ Ambient humidity: Relative humidity ≤85% Clean air, no dust, no corrosive and flammable gas, good ventilation
Cooling water	Clean without any minerals and other soluble substances Water temperature 20-30℃ Pressure 0.15±0.05Mpa
Communication Mode	Analog/RS485/RS232
Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Add.: 2000m to the South of Lihe Bridge, Jianshe South Road, Zunhua City, Hebei Province

Tel：+86 (0315) 6028838 / 6028868 / 6028898

Website：www.bovceed.com

24H Service Hotline：+86 135 8252 6663

E-mail：sash@sash.com.cn / sashcn@sash.com.cn

Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms

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