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BOMB VS series

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BOMB VS

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BOMB VS
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Technical Specifications of Bias Power Supply, BOMB VS Series

BOMB VS series of bias power supply works in high frequency secondary conversion mode in three output modes, including unipolar pulse, DC superimposed pulse and low voltage DC, and with independent adjustment of primary supply voltage, secondary supply voltage and pulse width. The flexible output mode is suitable for various applications such as hard film layer, decorative film layer and process development. Especially, the DC superimposed pulse mode effectively maintains the continuous bias voltage while controlling the workpiece temperature, which is very beneficial for tool coating.

Power Range

40/50/60/80KW (excluding sub-supply)

Sub-supply Power

6KW/12KW

Input power

Three-phase four-wire system 380V±10%50-60Hz

Output Mode

Pulse / DC bias pulse / low-voltage DC

Pulse Frequency

40KHz

Pulse Duty Cycle

10-90%

Output Voltage

0-200V 0-500V 0-1000V [DC/peak voltage]

Sub-supply Output Voltage

DC0-100V

Arc Extinguishing Time

≤1uS

Output Accuracy

Better than 2%

Cooling Mode

Water-cooled

Auxiliary Function

High temperature, condensation alarm

Service Environment

Ambient temperature: 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive and flammable gas, good ventilation

Cooling water

Clean without any minerals and other soluble substances
Water temperature 20-30℃
Pressure 0.15±0.05Mpa

Communication Mode

Analog/RS485/RS232

Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms