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SAMD series

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SAMD

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SAMD
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Technical Specifications of Multi-arc Magnetic Field Power Supply, SAMD Series

SAMD series of multi-arc magnetic field power supply works in high frequency conversion mode, single-pole pulsation mode output, with voltage, frequency, duty cycle independent adjustment. SAMD series power supply is mainly used for multi-arc ion coating machine arc target dynamic magnetic field scanning, adjust the plasma discharge angle, accelerate the arc spot movement speed, reduce the target droplet formation.

Power Range

3/6/12/20/30/40/60KW

Input power

Three-phase four-wire system 380V±10%50-60Hz

Output Mode

Pulse

Pulse Frequency

1-50HZ

Pulse Width

10-90%

Output Voltage

No load 60V

Output Accuracy

Better than 1%

Cooling Mode

3-12KW Air-cooled; 20-60K Water-cooled

Auxiliary Function

High temperature, condensation alarm (refer to water-cooled types only)

Service Environment

Ambient temperature: 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive and flammable gas, good ventilation

Cooling Water

Clean without any minerals and other soluble substances
Water temperature 20-30℃
Pressure 0.15±0.05Mpa

Communication Mode

Analog/RS485/RS232

Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Add.: 2000m to the South of Lihe Bridge, Jianshe South Road, Zunhua City, Hebei Province

Tel:+86 (0315) 6028838 / 6028868 / 6028898

Website:www.bovceed.com

24H Service Hotline:+86 135 8252 6663

E-mail:sash@sash.com.cn / sashcn@sash.com.cn

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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms