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SAMD series
Description
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Technical Specifications of Multi-arc Magnetic Field Power Supply, SAMD Series |
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SAMD series of multi-arc magnetic field power supply works in high frequency conversion mode, single-pole pulsation mode output, with voltage, frequency, duty cycle independent adjustment. SAMD series power supply is mainly used for multi-arc ion coating machine arc target dynamic magnetic field scanning, adjust the plasma discharge angle, accelerate the arc spot movement speed, reduce the target droplet formation. |
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Power Range |
3/6/12/20/30/40/60KW |
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Input power |
Three-phase four-wire system 380V±10％50-60Hz |
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Output Mode |
Pulse |
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Pulse Frequency |
1-50HZ |
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Pulse Width |
10-90% |
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Output Voltage |
No load 60V |
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Output Accuracy |
Better than 1% |
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Cooling Mode |
3-12KW Air-cooled; 20-60K Water-cooled |
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Auxiliary Function |
High temperature, condensation alarm (refer to water-cooled types only) |
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Service Environment |
Ambient temperature: 0-40℃ |
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Cooling Water |
Clean without any minerals and other soluble substances |
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Communication Mode |
Analog/RS485/RS232 |
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Note: The output characteristics of the power supply can be adjusted according to the needs of use. |
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms