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BOMB- III series

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BOMB IIIH

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BOMB IIIH
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Technical Specifications of Bias Power Supply, BOMB- IIIH Series

BOMB- IIIH series of bias power supply works in two-stage high frequency conversion mode, with unipolar pulse mode on the output, and pulse duty cycle 10-90%. Because the output voltage and pulse width of the power supply adopt independent adjustment, the workpiece temperature rise is controlled by changing the pulse width, in the same time to meet the required technological voltage. The power supply is applicable to film coating of various tools and decorative coating.

Power Range

3/6/12/20/30/50/40/60/80/100/120/160/200KW

Input Power

Three-phase four-wire system, 380V±10%50-60Hz

Output Mode

Pulse

Pulse Frequency

40KHZ

Pulse Duty Cycle

10-90%

Output Voltage

0-180V 0-500V 0-1000V [peak voltage]

Arc Extinguishing Time

≤1uS

Output Accuracy

Better than 2%

Cooling Mode

3-12KW air-cooled, 20-200KW Water-cooled

Auxiliary Function

High temperature, condensation alarm (refer to water-cooled types only)

Service Environment

Ambient temperature: 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive and flammable gas, good ventilation

Cooling Water

Clean without any minerals and other soluble substances
Water temperature 20-30℃
Pressure 0.15±0.05Mpa

Communication Mode

Analog/RS485/RS232

Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms