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BIV-40/60 series
Description
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Technical Specifications of Bias Power Supply, BIV-40/60 Series |
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BIV-40/60 series of bias power supply works in high frequency secondary conversion mode in three output modes, including positive and negative bipolar pulse, reverse unipolar pulse, and Reverse DC. The positive voltage of the power supply is adjusted with the movement, and the frequency and duty cycle are adjusted independently. Because the output of the power supply has bipolar characteristics, it can pre inhibit the sparking phenomenon caused by the accumulated charge on the surface of the workpiece, eliminate the arc damage of the workpiece, and change the deposition rules of the film.The output of BIV-40/60 series bias power supply adopts one-stage adjustment, the current automatically matches the voltage output, there is no voltage jump and break point caused by gear switching, combined with multiple output modes make this series power supply more suitable for hard film deposition. |
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Power Range |
40KW/60KW |
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Sub-supply Power |
12KW |
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Input power |
Three-phase four-wire system 380V±10％50-60Hz |
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Output Mode |
Bipolar pulse / reverse unipolar pulse / reverse DC |
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Pulse Frequency |
40KHz |
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Pulse Duty Cycle |
0-100% continuous adjustment |
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Output Voltage |
0-1000V [DC/peak voltage] |
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Sub-supply Output Voltage |
0-120V [Sub-supply, peak voltage] |
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Arc Extinguishing Time |
≤1uS |
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Output Accuracy |
Better than 1% |
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Cooling Mode |
Water-cooled |
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Auxiliary Function |
High temperature, condensation alarm |
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Service Environment |
Ambient temperature: 0-40℃ |
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Cooling water |
Clean without any minerals and other soluble substances |
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Communication Mode |
Analog/RS485/RS232 |
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Note: The output characteristics of the power supply can be adjusted according to the needs of use. |
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms