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BIV-40/60 series

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BIV-40/60

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BIV-40/60
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Technical Specifications of Bias Power Supply, BIV-40/60 Series

BIV-40/60 series of bias power supply works in high frequency secondary conversion mode in three output modes, including positive and negative bipolar pulse, reverse unipolar pulse, and Reverse DC. The positive voltage of the power supply is adjusted with the movement, and the frequency and duty cycle are adjusted independently. Because the output of the power supply has bipolar characteristics, it can pre inhibit the sparking phenomenon caused by the accumulated charge on the surface of the workpiece, eliminate the arc damage of the workpiece, and change the deposition rules of the film.The output of BIV-40/60 series bias power supply adopts one-stage adjustment, the current automatically matches the voltage output, there is no voltage jump and break point caused by gear switching, combined with multiple output modes make this series power supply more suitable for hard film deposition.

Power Range

40KW/60KW

Sub-supply Power

12KW

Input power

Three-phase four-wire system 380V±10%50-60Hz

Output Mode

Bipolar pulse / reverse unipolar pulse / reverse DC

Pulse Frequency

40KHz

Pulse Duty Cycle

0-100% continuous adjustment

Output Voltage

0-1000V [DC/peak voltage]

Sub-supply Output Voltage

0-120V [Sub-supply, peak voltage]

Arc Extinguishing Time

≤1uS

Output Accuracy

Better than 1%

Cooling Mode

Water-cooled

Auxiliary Function

High temperature, condensation alarm

Service Environment

Ambient temperature: 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive and flammable gas, good ventilation

Cooling water

Clean without any minerals and other soluble substances
Water temperature 20-30℃
Pressure 0.15±0.05Mpa

Communication Mode

Analog/RS485/RS232

Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms