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BOMB IA

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BOMB IA series

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BOMB IA

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BOMB IA

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Description

Parameters

Technical Specifications of Bias Power Supply, BOMB- IA Series
BOMB- IA series of bias power supply works in two-stage high frequency conversion mode, with unipolar pulse or DC mode on the output. Because the output voltage and pulse width of the power supply can adopt independent adjustment, the workpiece temperature rise is controlled by changing the pulse width, in the same time to meet the required technological voltage. That wider frequency pulse output and random DC output at any time can satisfy needs of particular technology avails the power supply more applicable to film coating of various tools.
Power Range	40/60KW
Input Power	Three -phase four-wire system, 380V±10％50-60Hz
Output Mode	DC/Pulse
Pulse Frequency	10-80KHZ
Pulse Percentage	10-90% continuous adjustment
Output Voltage	0-300V 0-1000V [DC/peak voltage]
Arc Extinguishing Rime	≤1uS
Output Accuracy	Better than 1%
Cooling Mode	Water-cooled
Auxiliary Function	High temperature, condensation alarm
Service Environment	Ambient temperature: 0-40℃ Ambient humidity: Relative humidity ≤85% Clean air, no dust, no corrosive and flammable gas, good ventilation
Cooling Water	Clean without any minerals and other soluble substances Water temperature 20-30℃ Pressure 0.15±0.05Mpa
Communication Mode	Analog/RS485/RS232
Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Add.: 2000m to the South of Lihe Bridge, Jianshe South Road, Zunhua City, Hebei Province

Tel：+86 (0315) 6028838 / 6028868 / 6028898

Website：www.bovceed.com

24H Service Hotline：+86 135 8252 6663

E-mail：sash@sash.com.cn / sashcn@sash.com.cn

Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms

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