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BOMB IA series

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BOMB IA

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BOMB IA
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Technical Specifications of Bias Power Supply, BOMB- IA Series

BOMB- IA series of bias power supply works in two-stage high frequency conversion mode, with unipolar pulse or DC mode on the output. Because the output voltage and pulse width of the power supply can adopt independent adjustment, the workpiece temperature rise is controlled by changing the pulse width, in the same time to meet the required technological voltage. That wider frequency pulse output and random DC output at any time can satisfy needs of particular technology avails the power supply more applicable to film coating of various tools.

Power Range

40/60KW

Input Power

Three -phase four-wire system, 380V±10%50-60Hz

Output Mode

DC/Pulse

Pulse Frequency

10-80KHZ

Pulse Percentage

10-90% continuous adjustment

Output Voltage

0-300V 0-1000V [DC/peak voltage]

Arc Extinguishing Rime

≤1uS

Output Accuracy

Better than 1%

Cooling Mode

Water-cooled

Auxiliary Function

High temperature, condensation alarm

Service Environment

Ambient temperature: 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive and flammable gas, good ventilation

Cooling Water

Clean without any minerals and other soluble substances
Water temperature 20-30℃
Pressure 0.15±0.05Mpa

Communication Mode

Analog/RS485/RS232

Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms