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SIC-I

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Bias power supply 
- BOMB IA
- BOMB III
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Arc power supply 
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Multi-arc magnetic field power supply 
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Ion source power supply 
- SIC-I
- SIC-II
Hollow cathode power supply 
- SHC II
Bombard cleaning power supply 
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Plasma polishing power supply 
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Gas flow control power supply 
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SIC-I series

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SIC-I

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Description

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Technical Specification of Ion Source Power Supply, SIC- I Series
SIC- I series of ion source power supply is used as a working power for Hall ion source, providing filament supply and anode supply required by the work. Both the filament supply and the anode supply of SIC I series of ion source power supply have applied the switching mode, with good stability and high working efficiency.
Power	Filament supply 1.5kW, anode supply 5kW
Input Power	Three-phase four-wire system 380V±10％50-60Hz
Filament Supply	Output voltage AC36V
	Output current AC40A
Anode Supply	Output voltage DC300V no load
	Output current DC20A
Output Current Accuracy	Better than 1%
Cooling Mode	Air-cooled
Service Environment	Ambient temperature: 0-40℃ Ambient humidity: Relative humidity ≤85% Clean air, no dust, no corrosive and flammable gas, good ventilation
Communication Mode	Analog
Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Add.: 2000m to the South of Lihe Bridge, Jianshe South Road, Zunhua City, Hebei Province

Tel：+86 (0315) 6028838 / 6028868 / 6028898

Website：www.bovceed.com

24H Service Hotline：+86 135 8252 6663

E-mail：sash@sash.com.cn / sashcn@sash.com.cn

Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms

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