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SST series
SST
Technical Specification of Intermediate Frequency AC Magnetron Sputtering Power Supply, SST Series |
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SST series of intermediate frequency magnetron sputtering power supply work in two-stage high frequency conversion mode, AC sinusoidal output 40kHz. Intermediate sputtering power supply makes two sputtering targets as load, two targets work alternatively. Therefore, each sputtering target has inverse voltage over half of the time during the work cycle, enabling the stored charge on the target surface to discharge sufficiently, beneficial to restrain arc discharge of the target materials and surface poisoning. |
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Power Range |
3/6/12/20/30/40/60/80/100/120KW |
Input power |
Three-phase four-wire system 380V±10%50-60Hz |
Output Current |
AC sine wave |
Output Frequency |
40KHz |
Output Voltage |
No load 1200V [effective value] |
Output Characteristics |
Constant current / constant power / constant voltage |
Arc Extinguishing Time |
≤0.5uS |
Output Accuracy |
Better than 1% |
Cooling Mode |
3-12KW air-cooled; 20-120KW water-cooled |
Auxiliary Function |
High temperature, condensation alarm, short circuit, open-circuit instruction and signal output (High temperature, condensation alarm refer to water-cooled types only) |
Service Environment |
Ambient temperature: 0-40℃ |
Cooling Water |
Clean without any minerals and other soluble substances |
Communication Mode |
Analog/RS485/RS232 |
Note: The output characteristics of the power supply can be adjusted according to the needs of use. |
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms