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SIC-II
SIC-II

Island SIC-II

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IslandSIC-II

Phone:+86 135 8252 6663

Product Description

Technical Specifications of Anode Layer Ion Source Power Supply, SIC- II Series

SIC-II series of ion source power supply is used as a working power for anode layer ion source, providing anode voltage required by different working stage. SIC II series ion source power applies high frequency switching mode, with good stability and high work efficiency.

Power

15KW

Input Power

Three-phase four-wire system 380V±10％50-60Hz

Anode Supply Voltage

DC 0-1000V, DC 0-3000V

Anode Supply Current

DC0-15A,0-5A

Output Characteristics

Constant current / constant voltage

Output Current Accuracy

Better than 1％

Cooling Mode

Air-cooled

Service Environment

Ambient temperature: 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive and flammable gas, good ventilation

Communication Mode

Analog/RS485/RS232

Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Pre sales consultation

Sales service

Sales service

After sales service 2

After sales service

Add.: 2000m to the South of Lihe Bridge, Jianshe South Road, Zunhua City, Hebei Province

Tel：+86 (0315) 6028838 / 6028868 / 6028898

Website：www.bovceed.com

24H Service Hotline：+86 135 8252 6663

E-mail：sash@sash.com.cn / sashcn@sash.com.cn

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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms

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