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SSPH
SSPH

Netherlands SSPH

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NetherlandsSSPH

Phone:+86 135 8252 6663

Product Description

Technical Specification of High Power Pulse Magnetron Sputtering Power Supply, SSPH Series

SSPH series of high power pulse magnetron sputtering (HPPMS) power supply works in two-stage high frequency conversion mode with DC pulse output. The individual pulse can export 2-8 megawatt instantaneous power. Cathode material with high power density will generate high metal ionization rate, and free from target particles. The fine binding force and compactness of the coating made by this series of power supply is suitable for making hard film coating and high end decorative coating.

Power Range

15/20/30/40KW

Input power

Three-phase four-wire system 380V±10％50-60Hz

Output Mode

Unipolar narrow pulse

Pulse Width

5-250uS

Pulse Frequency

500HZ max.

Output Voltage

No load 1000-2000V

Output Accuracy

1200A 2400A 3600A 4800A

Arc Extinguishing Time

≤1uS

No Load Sustainability

100%

Cooling Mode

Air-cooled

Service Environment

Ambient temperature: 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive and flammable gas, good ventilation

Communication Mode

Analog/RS485/RS232

Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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Pre sales consultation

Sales service

Sales service

After sales service 2

After sales service

Add.: 2000m to the South of Lihe Bridge, Jianshe South Road, Zunhua City, Hebei Province

Tel：+86 (0315) 6028838 / 6028868 / 6028898

Website：www.bovceed.com

24H Service Hotline：+86 135 8252 6663

E-mail：sash@sash.com.cn / sashcn@sash.com.cn

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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms

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