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Product Description
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Technical Specifications of Vacuum Arc Ion Plating Arc Power Supply, SAZ Series |
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SAZ type arc power supply works in high frequency conversion mode with DC output, and the power supply current adjustment is realized by changing the pulse width of high frequency conversion. The circuit adopts zero point voltage switching (ZVS) technology, low loss, good electromagnetic compatibility, using current sensor as current sampling, with high current stability rate. Due to the high power of the power supply, the whole series adopts water cooling, which is suitable for large flat targets and columnar targets as well as long time coating use. |
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Power |
SAZ-250 8.5KW; SAZ-315 11KW; SAZ-400 14KW |
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Input power |
Three-phase four-wire system 380V±10％50-60Hz |
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Output Voltage |
No load 80V |
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Output Current |
SAZ-250 260A; SAZ-315 320A; SAZ-400 410A |
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Output Accuracy |
Better than 1% |
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Cooling Mode |
Water-cooled |
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Auxiliary Function |
High temperature, condensation alarm |
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Load Rate |
100% |
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Service Environment |
Ambient temperature: 0-40℃ |
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Cooling water |
Clean without any minerals and other soluble substances |
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Communication Mode |
Analog/RS485/RS232 |
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms