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Product Description
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SST2 series medium frequency AC magnetron sputtering power supply technical specifications |
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The SST2 series medium-frequency magnetron sputtering power source operates in a two-stage high-frequency conversion mode, with an AC output frequency of 400KHz. The medium-frequency sputtering power source uses two magnetron sputtering targets as the load, with the targets working alternately. Therefore, for more than half of a sputtering cycle, a reverse voltage cut-off sputtering occurs, which allows the accumulated charge on the target surface to be fully discharged. This is beneficial for suppressing target arc discharge and surface poisoning, making it especially suitable for the deposition of reactive film layers. The SST2 series medium-frequency magnetron sputtering power source outputs at a frequency of 400KHz, and the higher frequency increases the switching rate of dual-target operation, deeply suppressing the accumulation of charge and arc energy, resulting in a significant improvement in the quality of the reactive film layer. |
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Power Supply Power Range |
5/10/20/30KW |
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Input Power Supply |
Three-phase four-wire system 380V±10% 50-60Hz |
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Output Mode |
Alternating sine wave |
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Pulse Frequency |
400KHz |
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Output Voltage |
No-load 1000V [peak voltage] |
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Output Characteristics |
Constant Current / Constant Power / Constant Voltage |
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Arc Extinguishing Time |
≤0.5uS |
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Output Accuracy |
Better than 1% |
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Cooling Method |
5-10KW air-cooled; 20-40KW water-cooled |
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Assistive Features |
High temperature, condensation, short circuit, open circuit indication and signal output (high temperature, condensation, limited to water-cooled models) |
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Operating Environment Conditions |
Environmental Temperature: 0-40°C Environmental Humidity: Relative humidity ≤85% Air Cleanliness: No dust, no corrosive or flammable gases, well ventilated |
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Cooling Water |
Cleanliness: Free from minerals and other soluble substances Water Temperature: 20-30°C Pressure: 0.15±0.05Mpa |
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Communication Method |
Analog/RS485/RS232 |
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The output characteristics of the power supply can be adjusted according to user requirements. |
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms