E-mail:sash@sash.com.cn 中文版 | English
Product Description
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Technical Specifications of Bias Power Supply, BOMB- IA Series |
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BOMB- IA series of bias power supply works in two-stage high frequency conversion mode, with unipolar pulse or DC mode on the output. Because the output voltage and pulse width of the power supply can adopt independent adjustment, the workpiece temperature rise is controlled by changing the pulse width, in the same time to meet the required technological voltage. That wider frequency pulse output and random DC output at any time can satisfy needs of particular technology avails the power supply more applicable to film coating of various tools. |
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Power Range |
40/60KW |
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Input Power |
Three -phase four-wire system, 380V±10%50-60Hz |
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Output Mode |
DC/Pulse |
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Pulse Frequency |
10-80KHZ |
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Pulse Percentage |
10-90% continuous adjustment |
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Output Voltage |
0-300V 0-1000V [DC/peak voltage] |
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Arc Extinguishing Rime |
≤1uS |
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Output Accuracy |
Better than 1% |
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Cooling Mode |
Water-cooled |
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Auxiliary Function |
High temperature, condensation alarm |
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Service Environment |
Ambient temperature: 0-40℃ |
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Cooling Water |
Clean without any minerals and other soluble substances |
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Communication Mode |
Analog/RS485/RS232 |
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Note: The output characteristics of the power supply can be adjusted according to the needs of use. |
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms
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