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Product Description
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Technical Specification of Intermediate Frequency AC Magnetron Sputtering Power Supply, SSDH Series |
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SSDH series of intermediate frequency magnetron sputtering power supply work in two-stage high frequency conversion mode, AC sinusoidal output. The power output frequency can be set to 100, 125, 150, 175, 200 kHz, or 200, 250, 350, 400 kHz, for the deposition of compound film, and related technological development. |
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Power Range |
2-20KW |
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Input power |
Three-phase four-wire system 380V±10％50-60Hz |
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Output Mode |
AC sine wave |
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Output Frequency |
100, 125, 150, 175, 200KHZ or 200, 250, 350, 400 KHZ |
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Output Voltage |
No load 1000V [effective value] |
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Output Characteristics |
Constant current / constant power / constant voltage |
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Arc Extinguishing Time |
≤0.5uS |
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Output Stability |
Better than 0.5% |
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Cooling Mode |
Air-cooled |
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Service Environment |
Ambient temperature: 0-40℃ |
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Communication Mode |
Analog/RS485/RS232 |
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Note: The output characteristics of the power supply can be adjusted according to the needs of use. |
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms