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Product Description
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BSPH series high-power pulsed magnetron sputtering power supply technical specifications |
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The BSPH series high-power pulsed magnetron sputtering (HiPMIS, HPPMS) power supply operates in a two-stage high-frequency conversion mode with DC pulse output. A single pulse can deliver peak power of 2 to 8 megawatts. The high power density of the cathode material will produce a high rate of metal ionization and does not contain target particles. The coatings prepared by this series of power supplies exhibit good adhesion and density, and can be used for the preparation of a variety of functional films and high-end decorative film layers. The BSPH series high-power pulsed magnetron sputtering power supply can switch between constant peak current and constant voltage output modes. It is possible for multiple HiPMIS power supplies to operate with synchronized frequency and width output. Of course, multiple units can also operate independently, providing excellent combinability and adaptability to the field. |
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Power supply capacity range |
20/40/60/80KW |
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Input power supply |
Three-phase four-wire system 380V±10% 50-60Hz |
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Output mode |
Unipolar narrow pulse |
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Pulse width |
5-250uS |
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Pulse frequency |
10-1000Hz |
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Output voltage |
No-load 1000-2000V |
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Output current |
1200A 2400A 3600A 4800A |
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Output characteristics |
Constant Peak Current / Constant Voltage |
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Arc extinguishing time |
≤1uS |
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Duty cycle |
100% |
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Cooling method |
Water cooling |
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Operating environment |
Environmental Temperature: 0-40°C Environmental Humidity: Relative humidity ≤ 85% Air Cleanliness: No dust, non-corrosive, flammable gases, with good ventilation. |
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Communication method |
RS485/RS232 |
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The output power of the power supply can be adjusted according to the usage requirements. |
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms