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产品描述
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SSIII2 Series DC Pulse Magnetron Sputtering Power Supply Technical Specifications |
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The SSIII2 series magnetron sputtering power supplies operate in a secondary high-frequency conversion mode, delivering output in a unipolar pulse manner, with independently adjustable current and pulse width. When operating in pulse mode, the sputtering target works at a high-frequency intermittent state, which allows certain discharge time for accumulated charge on the target surface, beneficial for suppressing target arcing and reducing contamination of the coating by target particles. The SSIII2 series magnetron sputtering power supply can output pulse frequencies up to 400 KHz, greatly suppressing the energy of target arcing and reducing target particles, effectively improving the compactness of the film layer. The power supply is suitable for high-end metal film and reactive film sputtering deposition. |
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Power Supply Power Range |
5/10/20/30/40KW |
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Input Power Supply |
Three-phase four-wire system 380V±10% 50-60Hz |
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Output Mode |
Unipolar Pulse |
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Pulse Frequency |
100-400KHz |
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Pulse Duty Cycle |
40-90％ |
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Output Voltage |
No-load 1000V [peak voltage] |
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Output Characteristics |
Constant Current / Constant Power / Constant Voltage |
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Arc Extinguishing Time |
≤1uS |
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Output Accuracy |
Better than 1% |
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Cooling Method |
5-10KW air-cooled; 20-40KW water-cooled |
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Assistive Features |
High temperature, condensation, short circuit, open circuit indication and signal output (high temperature, condensation, limited to water-cooled models) |
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Operating Environment Conditions |
Environmental Temperature: 0-40°C Environmental Humidity: Relative humidity ≤85% Air Cleanliness: No dust, no corrosive or flammable gases, well ventilated |
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Cooling Water |
Cleanliness: Free from minerals and other soluble substances Water Temperature: 20-30°C Pressure: 0.15±0.05Mpa |
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Communication Method |
Analog/RS485/RS232 |
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The output characteristics of the power supply can be adjusted according to user requirements. |
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms