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产品描述
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SSIV Series Bipolar Pulse Magnetron Sputtering Power Supply Technical Specifications |
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The SSIV series bipolar pulse magnetron sputtering power supply operates in a secondary high-frequency conversion mode, with bipolar pulse output, and the current and pulse width of the power supply can be adjusted independently. The SSIV series bipolar pulse magnetron sputtering power supply sends a reversal pulse of about 100V to the magnetron sputtering target immediately after a sputtering pulse ends, actively neutralizing the accumulated charge on the target material surface, thereby inhibiting the occurrence of target surface arcs and avoiding target material particles contaminating the coating. Due to the above features, the SSIV series bipolar pulse magnetron sputtering is particularly suitable for high-end reactive film layer sputtering deposition. |
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Power Supply Power Range |
5/10/20/30/40KW |
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Input Power Supply |
Three-phase four-wire system 380V±10%, 50-60Hz |
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Output Mode |
Bipolar Pulse |
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Pulse Frequency |
1-150KHz |
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Pulse Duty Cycle |
40-90％ |
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Output Voltage |
No-load 1000V [peak voltage] |
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Reverse Voltage |
100V |
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Output Characteristics |
Constant Current / Constant Power / Constant Voltage |
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Arc Quenching Time |
≤1uS |
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Output Accuracy |
Better than 1% |
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Cooling Method |
air-cooled; 20-40KW water-cooled |
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Assistive Features |
High temperature, condensation, short circuit, open circuit indication, and signal output (high temperature and condensation are limited to water-cooled models). |
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Operating Environment |
Ambient temperature: 0-40℃ Ambient humidity: Relative humidity ≤ 85% Air cleanliness: No dust, non-corrosive, non-flammable gases, good ventilation |
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Cooling Water |
Cleanliness: Free from minerals and other soluble substances Water temperature: 20-30℃ Pressure: 0.15±0.05Mpa |
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Communication Mode |
Analog/RS485/RS232 |
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The output characteristics of the power supply can be adjusted according to the needs of the user. |
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms