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产品描述
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BOMBIII2 Series Bias Power Supply Technical Specifications |
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The BOMBIII2 series bias power supply operates in a secondary high-frequency switching mode with unipolar pulse output. The pulse duty cycle ranges from 10-90% for air conditioning. Since the output voltage of the power supply is independently adjustable from the pulse width, the workpiece temperature rise can be controlled by altering the pulse width while satisfying the voltage required for the process. The BOMBIII2 series bias power supply has an output frequency of up to 400kHz. The high-frequency pulses are beneficial for improving the film structure and enhancing the density of the film. The change in the film structure can also match specific film colors, indicating a strong applicability of the power supply. It is suitable for various high-end hard coatings and decorative plating applications. |
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Power Supply Power Range |
5/10/20/30/40/KW |
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Input Power Supply |
Three-phase four-wire system 380V±10% 50-60Hz |
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Output Mode |
Unipolar Pulse |
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Pulse Frequency |
100-400KHz |
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Pulse Duty Cycle |
10-90％ |
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Output Voltage |
0-180V 0-500V 0-1000V[Peak Voltage] |
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Arc Extinguishing Time |
≤1uS |
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Output Precision |
Better than 1% |
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Cooling Method |
5-10KW air-cooled; 20-40KW water-cooled. |
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Assistive Features |
High temperature and condensation alarm (high temperature and condensation limited to water-cooled models) |
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Operating Environment Conditions |
Environmental Temperature: 0-40°C Environmental Humidity: Relative humidity ≤85% Air Cleanliness: No dust, no corrosive and flammable gases, well-ventilated |
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Cooling Water |
Cleanliness: Free of minerals and other soluble substances Water Temperature: 20-30°C Pressure: 0.15±0.05 MPa |
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Communication Method |
Analog/RS485/RS232 |
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The power supply's output characteristics can be adjusted according to user requirements. |
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Main business: medium frequency power supply, medium frequency magnetron sputtering power supply, bias power supply, bipolar pulse bias power supply, dc magnetron sputtering power supply, magnetron sputtering power supply, high power pulse magnetron sputtering power supply, hppms