SS III series

Description

Technical Specification of DC Magnetron Sputtering Power Supply, SS-III Series

SS -III series of magnetron sputtering power supply works in two-stage high frequency conversion mode with unipolar output mode, independent adjustment of the current supplied and the pulse width. When it works in pulse mode, the sputtering target works in high frequency intermittent state, enabling the stored charge on surface of the target to have certain discharging time. This is beneficial to restrain arc discharge and surface poisoning of the target, suitable for reaction sputtering film.

Power Range

3/6/12/20/30/40/60/80/100/120KW

Input power

Three-phase four-wire system 380V±10％50-60Hz

Output Mode

Pulse

Pulse Frequency

40KHZ

Pulse Duty Cycle

10-90％

Output Voltage

No load 1000V [peak voltage]

Output Characteristics

Constant current / constant power / constant voltage

Arc Extinguishing Time

≤1uS

Output Accuracy

Better than 1％

Cooling Mode

3-12KW air-cooled; 20-120KW water-cooled

Auxiliary Function

High temperature, condensation alarm, short circuit, open-circuit instruction and signal output (High temperature, condensation alarm refer to water-cooled types only)

Service Environment

Ambient temperature: 0-40℃
Ambient humidity: Relative humidity ≤85%
Clean air, no dust, no corrosive and flammable gas, good ventilation

Cooling Water

Clean without any minerals and other soluble substances
Water temperature 20-30℃
Pressure 0.15±0.05Mpa

Communication Mode

Analog/RS485/RS232

Note: The output characteristics of the power supply can be adjusted according to the needs of use.

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